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Postpolymerization of Functional Organosiloxanes: An Efficient Strategy for Preparation of Low-k Material with Enhanced Thermostability and Mechanical Properties
Alternative TitlePostpolymerization of Functional Organosiloxanes: An Efficient Strategy for Preparation of Low-k Material with Enhanced Thermostability and Mechanical Properties
Yuan C(袁超); Wang JJ(王佳佳); Jin KK(金凯凯); Diao S(刁屾); Sun J(孙晶); Tong JW(童佳伟); Fang Q(房强)
2014
Source PublicationMacromolecules
Volume47Issue:18Pages:6311-6315
AbstractA novel functional oligomer (Si-TFVE) with a siloxane backbone and thermally cross-linkable trifluorovinyl ether groups (-OCF=CF2) is reported here. When postpolymerized at high temperature, Si-TFVE converts to an amorphous cross-linked network (Si-PFCB), which shows a dielectric constant of 2.33 and dielectric loss below 2.1 X 10(-3) at 30 MHz. Si-PFCB also shows excellent film uniformity with the surface roughness less than 5.79 nm over a 1 mu m square area. Moreover, Si-PFCB shows high thermostability with a 5 wt % loss temperature of 472 degrees C and no obvious T-g below 350 degrees C. In regard to the mechanical properties, Si-PFCB has Young's modulus, hardness, and bonding strength with silicon wafer surface of 10.06 GPa, 0.392, and 4.93 GPa, respectively. These results suggest that such oligomer is suitable for utilization in ultralarge scale integration circuits. In addition, this contribution provides a new route to prepare cross-linked organosiloxanes only by heating instead of using catalysts or initiators in the traditional procedures.
Subject Area高分子化学
DOI10.1021/ma501263c
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Indexed BySCI
Language英语
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Cited Times:33[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sioc.ac.cn/handle/331003/38902
Collection高分子材料研究室
Corresponding AuthorFang Q(房强)
Affiliation中科院上海有机化学研究所
Recommended Citation
GB/T 7714
Yuan C,Wang JJ,Jin KK,et al. Postpolymerization of Functional Organosiloxanes: An Efficient Strategy for Preparation of Low-k Material with Enhanced Thermostability and Mechanical Properties[J]. Macromolecules,2014,47(18):6311-6315.
APA 袁超.,王佳佳.,金凯凯.,刁屾.,孙晶.,...&房强.(2014).Postpolymerization of Functional Organosiloxanes: An Efficient Strategy for Preparation of Low-k Material with Enhanced Thermostability and Mechanical Properties.Macromolecules,47(18),6311-6315.
MLA 袁超,et al."Postpolymerization of Functional Organosiloxanes: An Efficient Strategy for Preparation of Low-k Material with Enhanced Thermostability and Mechanical Properties".Macromolecules 47.18(2014):6311-6315.
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