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学科主题: 高分子化学
题名: Postpolymerization of Functional Organosiloxanes: An Efficient Strategy for Preparation of Low-k Material with Enhanced Thermostability and Mechanical Properties
其他题名: Postpolymerization of Functional Organosiloxanes: An Efficient Strategy for Preparation of Low-k Material with Enhanced Thermostability and Mechanical Properties
作者: Yuan C(袁超); Wang JJ(王佳佳); Jin KK(金凯凯); Diao S(刁屾); Sun J(孙晶); Tong JW(童佳伟); Fang Q(房强)
通讯作者: 房强
刊名: Macromolecules
发表日期: 2014
DOI: 10.1021/ma501263c
卷: 47, 期:18, 页:6311-6315
收录类别: SCI
英文摘要: A novel functional oligomer (Si-TFVE) with a siloxane backbone and thermally cross-linkable trifluorovinyl ether groups (-OCF=CF2) is reported here. When postpolymerized at high temperature, Si-TFVE converts to an amorphous cross-linked network (Si-PFCB), which shows a dielectric constant of 2.33 and dielectric loss below 2.1 X 10(-3) at 30 MHz. Si-PFCB also shows excellent film uniformity with the surface roughness less than 5.79 nm over a 1 mu m square area. Moreover, Si-PFCB shows high thermostability with a 5 wt % loss temperature of 472 degrees C and no obvious T-g below 350 degrees C. In regard to the mechanical properties, Si-PFCB has Young's modulus, hardness, and bonding strength with silicon wafer surface of 10.06 GPa, 0.392, and 4.93 GPa, respectively. These results suggest that such oligomer is suitable for utilization in ultralarge scale integration circuits. In addition, this contribution provides a new route to prepare cross-linked organosiloxanes only by heating instead of using catalysts or initiators in the traditional procedures.
语种: 英语
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内容类型: 期刊论文
URI标识: http://ir.sioc.ac.cn/handle/331003/38902
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作者单位: 中科院上海有机化学研究所

Recommended Citation:
Yuan C,Wang JJ,Jin KK,et al. Postpolymerization of Functional Organosiloxanes: An Efficient Strategy for Preparation of Low-k Material with Enhanced Thermostability and Mechanical Properties[J]. Macromolecules,2014,47(18):6311-6315.
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